Dual Thermo-chiller/High-performance Inverter Type HRZD
FEATURE OF Dual Thermo-chiller/High-performance Inverter Type HRZD
・Temperatures for 2 systems can be controlled separately by one chiller.
・Double inverter type: Substantially more energy is saved by using a DC inverter
refrigerator and inverter pump.
・Space saving: Footprint reduced by 23%
・Reduced wiring, piping, and labor: Single power cable, Single facility-water piping system
・Compliant with SEMI Standards, CE-marking
Water-cooled Thermo-chiller/High-performance Type HRW
FEATURE OF THERMO-CHILLER : High-performance Inverter Type HRZ
・Direct heat exchanger for in-plant circulating fluid
・Can control the temperature over a wide range since a compressor is not required.
・Suitable for semiconductor processing equipment with a wide variety of features,
such as high-temperature stability, a wide temperature range, failure diagnosis,
external communication, etc.
・Compliant with UL Standards, SEMI Standards, CE-marking
・It is possible to select the inverter type.