FEATURE OF THERMO-CHILLER : High-performance Type HRZ
・Suitable for semiconductor processing equipment with a wide variety of features,
such as high-temperature stability, a wide temperature range, failure diagnosis,
external communication, etc.
・Compliant with various safety standards
・Compliant with UL Standards, SEMI Standards, CE-marking
FEATURE OF THERMO-CHILLER : High-performance Inverter Type HRZ
・In addition to the state-of-the-art functions of the HRZ series,
these models employ a DC inverter compressor to achieve better energy efficiency.
・A wide temperature range and cooling capacity range are covered by one unit.
・Suited to the short innovation cycle of semiconductor equipment,
Capable of responding flexibly to changes in the process conditions
・Compliant with UL Standards, SEMI Standards, CE-marking
